振動形マイクロジャイロの設計指針 [in Japanese] Design Problems on Vibratory Micro-Gyroscopes [in Japanese]
Access this Article
Search this Article
Recently, some types of micromachined gyroscopes (angular rate sensor) have been reported. Micromachined gyroscopes are suitable for familiar products such as a VTR, auto mobile and toy, where cost effective and mass production are required. However, it seems that many of problems and difficulties for designing the micro gyroscopes still remain. This study deals with such design problems on micromachined gyroscopes. The paper includes discussions about the analysis of the mass movement according to applied angular rate, optimum design respect to product of the sensitivity and response frequency, some problems in peripheral circuitry, acceleration sensitivity, a method to drive a mass, and a problems on the temperature dependence.
- The Journal of the Institute of Electrical Engineers of Japan
The Journal of the Institute of Electrical Engineers of Japan 118(7), 377-383, 1998-07-01
The Institute of Electrical Engineers of Japan