マイクロフローセンサにおける熱伝達解析 An Analysis of Heat Transfer for a Micro-Flow Sensor

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Thermal interaction between a micro-flow sensor and the air flow around it was investigated. At a higher flow velocity. the Navier-Stokes' equation, coupled with the heat-conduction equation of the sensor, was solved. The heat-transfer coefficient by the simulation was roughly equal to the one calculated from the forced convection heat transfer theory. At the zero flow velocity, the interaction between the sensor and the air was simulated by FEM. The heat energy from the sensor to the air was almost fixed at the heat conductivity of the air multiplied by the temperature gradient of the sensor from the silicon plate. At a lower air flow velocity, the thermal sensitivity of the sensor nearer to the silicon plate is limited.

収録刊行物

  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society  

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 119(1), 38-43, 1999-01-01 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10004833729
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    13418939
  • NDL 記事登録ID
    970625
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  CJP引用  NDL  J-STAGE 
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