マイクロ・アクチュエータのためのゾルーゲル法によるPZT積層膜の作製と評価 Preparation and Characterization of Sol-Gel Derived PZT Thin Films for Micro Actuators
The Pb(Zr<sub>1-x</sub>Ti<sub>x</sub>)O<sub>3</sub>, (PZT) of thickness of 3μm was fabricated using Sol-Gel spinning-coating onto Pt/Ti/SiO<sub>2</sub>/Si substrates. The preferred orientation of the PZT films was observed using X-ray diffraction analysis (XRD) and the microstructure was investigated using scanning electron microscopy (SEM). The preferred orientations in the direction of the (100) plane were obtained using the treatment for pyrolysis at 573K and for crystallization at 823K. The present PZT films showed dielectric constants about 1200. Ferroelectricity of these films was established with the values of the remnant polarization of 12.5μC/cm<sup>2</sup> and the coercive field of 29.0kV/cm.
- 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society
電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 119(4), 254-259, 1999-04
The Institute of Electrical Engineers of Japan