静電力チャックを用いた絶縁薄膜の引張試験 Tensile Testing of Insulating Thin Films Using Electrostatic Force Grip
A new chucking system for tensile testing of insulating thin films using electrostatic force has been developed. The free end of a cantilever beam specimen has an electrode, which is fix to a probe on which a pair of electrodes is fabricated to apply the voltage. The system is applied to tensile testing of plasma CVD SiO<sub>2</sub> thin films. The tested part of the specimen is 0.65μm thick, 1-5μm wide and 30-300μm long. The mean tensile strength of the specimen is 1.6-2.3GPa depending on the specimen size. The strength is higher than that of the bulk materials. The fracture toughness of the film is 1.4-2.0MPa√m, which is calculated from the fracture strength of notched specimens.
- 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society
電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 119(5), 290-294, 1999-05
The Institute of Electrical Engineers of Japan