Small Magnetic Levitation System with a Millimeter-sized Cylindrical Rotor

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In order to study contact-free levitation systems for micromachines, our group has developed a levitation system with a millimeter-sized cylindrical rotor. The system consists of a rotor (2.0mmφ×8mm, 95mg), a pair of electromagnets for levitation, two pair of photo diodes for sensing, and an analog PD controller. The photo diodes detect axial displacements and rotation speeds of the rotor. The rotor and the electromagnets are so small that the rotor in the radial direction is passively stabilized. This paper describes closed-loop frequency responses, follow-up control characteristics, impulse responses, and rotation decay characteristics. From the results, it is found that the levitating rotor makes a very quick response because of the small mass 95mg, and that photo diodes are useful for sensing rotation speeds, and that the levitation system is applicable to frictionless micromechanisms.

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  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society  

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 119(6), 321-326, 1999-06 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10004834025
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    13418939
  • NDL 記事登録ID
    4739495
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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