エキシマレーザー照射によるマイクロカンチレバーのスティクションリカバリー Stiction Recovery of Micro-cantilevers with Excimer Laser Irradiation

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The recovery process of stiction-failed micro-cantilevers with excimer laser irradiation has been investigated experimentally and numerically. Micro-cantilevers with various lengths have been prepared with standard surface micromachining process. KrF laser is used for experiment, and the influence of the laser parameters on the recovery yield have been examined experimentally. The laser fluence has strong impact on the recovery yield of the stiction-failed micro-cantilevers. The recovery yield does not exhibit significant dependence on the repetition rate and the number of pulses. Temperature rise of the cantilevers is numerically calculated by solving a set of energy conservation equations that includes the non-equilibrium nature of the carriers and the crystal lattice in the cantilevers. The carrier temperature rise becomes lower than the femtosecond laser irradiation case, and thus the carrier induced recovery process is not expected to occur. The lattice temperature rise becomes significant at the time scale of the laser pulse width. Lattice temperature difference between the front and rear surface of the cantilever also becomes significant. The lattice temperature may have strong influence on the recovery yield.

収録刊行物

  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 119(6), 340-345, 1999-06

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10004834054
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    13418939
  • NDL 記事登録ID
    4739518
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  CJP引用  NDL  J-STAGE 
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