エキシマレーザー照射によるマイクロカンチレバーのスティクションリカバリー Stiction Recovery of Micro-cantilevers with Excimer Laser Irradiation
The recovery process of stiction-failed micro-cantilevers with excimer laser irradiation has been investigated experimentally and numerically. Micro-cantilevers with various lengths have been prepared with standard surface micromachining process. KrF laser is used for experiment, and the influence of the laser parameters on the recovery yield have been examined experimentally. The laser fluence has strong impact on the recovery yield of the stiction-failed micro-cantilevers. The recovery yield does not exhibit significant dependence on the repetition rate and the number of pulses. Temperature rise of the cantilevers is numerically calculated by solving a set of energy conservation equations that includes the non-equilibrium nature of the carriers and the crystal lattice in the cantilevers. The carrier temperature rise becomes lower than the femtosecond laser irradiation case, and thus the carrier induced recovery process is not expected to occur. The lattice temperature rise becomes significant at the time scale of the laser pulse width. Lattice temperature difference between the front and rear surface of the cantilever also becomes significant. The lattice temperature may have strong influence on the recovery yield.
- 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society
電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 119(6), 340-345, 1999-06
The Institute of Electrical Engineers of Japan