SEM画像を利用した微細作業支援システムの構築 Operation Support System Driven by SEM Image for Micro Assembly

この論文にアクセスする

この論文をさがす

著者

抄録

This paper proposes an operation support system using images of scanning electron microscope (SEM) for micro assembly, which is called "image driven operation system (IDOS)". IDOS works as an interface between an operation site and a micro processing site. The authors designed the following three functions in IDOS for micro assembly using a real time image matching and a SEM magnification controlling: (1) indication of a deformed figure for easy operation, (2) image-driven manipulation using a visual pixel feedback, and (3) automatic operation of tasks which hides low magnification images. Through the experimental pick-and-place task using a 100μm-sized "micro torii" under SEM observation, we evaluated that IDOS worked effectively as intended.

収録刊行物

  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society  

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 119(7), 359-367, 1999-07 

    The Institute of Electrical Engineers of Japan

参考文献:  10件

参考文献を見るにはログインが必要です。ユーザIDをお持ちでない方は新規登録してください。

各種コード

  • NII論文ID(NAID)
    10004834085
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    13418939
  • NDL 記事登録ID
    4780417
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  NDL  J-STAGE 
ページトップへ