An Electrostatic Servo-Accelerometer with mG Resolution

• Ko Sangchoon

  Tohoku University

• Sim Dongyoun

  Tohoku University

• Esashi Masayoshi

  Tohoku University

書誌事項

タイトル別名

• Electrostatic Servo-Accelerometer with mG Resolution

抄録

An electrostatic servo silicon accelerometer with mG resolution for measurment of the seismic movement was developed. The sensor is composed of a glass-silicon-glass structure by using bulk silicon micromaching techniques. It has a mass and four suspending beams. The working range of the sensor is ±1G and operating frequency bandwidth is 1kHz. The resolution is 1.6mG. To achieve high sensitivity thin beams are required for springs and shield electrodes are formed on the glass to prevent an electrostatic bonding of the beam to the glass.

収録刊行物

• 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）

  電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 119 (7), 368-373, 1999

  一般社団法人 電気学会

キーワード

• Accelerometer
• Seismometer
• Sensor Packaging
• Anodic Bonding

詳細情報

• CRID: 1390001204462257792
• NII論文ID: 10004834096
• NII書誌ID: AN1052634X
• DOI: 10.1541/ieejsmas.119.368
• ISSN: 13475525
• ISSN: 13418939
• NDL書誌ID: 4780443
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4780443
• Web Site: http://www.jstage.jst.go.jp/article/ieejsmas1995/119/7/119_7_368/_pdf
• 本文言語コード: en
• データソース種別:
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• 抄録ライセンスフラグ: 使用不可