An Electrostatic Servo-Accelerometer with mG Resolution

• Ko Sangchoon

  Tohoku University

• Sim Dongyoun

  Tohoku University

• Esashi Masayoshi

  Tohoku University

Bibliographic Information

Other Title

• Electrostatic Servo-Accelerometer with mG Resolution

Abstract

An electrostatic servo silicon accelerometer with mG resolution for measurment of the seismic movement was developed. The sensor is composed of a glass-silicon-glass structure by using bulk silicon micromaching techniques. It has a mass and four suspending beams. The working range of the sensor is ±1G and operating frequency bandwidth is 1kHz. The resolution is 1.6mG. To achieve high sensitivity thin beams are required for springs and shield electrodes are formed on the glass to prevent an electrostatic bonding of the beam to the glass.

Journal

• IEEJ Transactions on Sensors and Micromachines

  IEEJ Transactions on Sensors and Micromachines 119 (7), 368-373, 1999

  The Institute of Electrical Engineers of Japan

Keywords

• Accelerometer
• Seismometer
• Sensor Packaging
• Anodic Bonding

Details

• CRID: 1390001204462257792
• NII Article ID: 10004834096
• NII Book ID: AN1052634X
• DOI: 10.1541/ieejsmas.119.368
• ISSN: 13475525
• ISSN: 13418939
• NDL BIB ID: 4780443
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4780443
• Web Site: http://www.jstage.jst.go.jp/article/ieejsmas1995/119/7/119_7_368/_pdf
• Text Lang: en
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed