室内空気汚染に対して高感度な酸化物半導体材料の探索 Exploration of Highly Sensitive Oxide Semiconductor Materials to Indoor-Air Pollutants.

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Recently, the number of people taken ill in new house by indoor-air pollution, is steadily increasing. The phenomenon is what is called "sick house syndrome". Mostly it is caused by formaldehyde and VOC (Volatile Organic Compound) included in adhesive or paint. The development of a sensor system available to measure the indoor-air pollution level at high sensitivity is highly desired. The present work was carried out for searching highly sensitive oxide semiconductor materials to formaldehhyde, xylene, toluen. Among 23 metal oxides examined, SnO<sub>2</sub>, WO<sub>3</sub>, In<sub>2</sub>O<sub>3</sub>, ZnO, Co<sub>3</sub>O<sub>4</sub> and Cr<sub>2</sub>O<sub>3</sub> showed relatively high sensitivity. Formaldehyde could be detected with excellent sensitivities by both SnO<sub>2</sub> and In<sub>2</sub>O<sub>3</sub> elements operated at 350°C. The high sensitivity to xylene and toluene was achieved by both WO<sub>3</sub> and In<sub>2</sub>O<sub>3</sub> elements operated at 350°C. Further, the sensing property of SnO<sub>2</sub> element to formaldehyde was extremely improved by the addition of Ag, and that of In<sub>2</sub>O<sub>3</sub> one to xylene or toluene was also largely improved by the addition of Pd.

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  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society  

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 119(7), 383-389, 1999-07 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10004834127
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    13418939
  • NDL 記事登録ID
    4780477
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  CJP引用  NDL  J-STAGE 
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