回転振動形ジャイロスコープに関する基礎研究 [in Japanese] Preliminary study on rotational vibrating disk gyroscope [in Japanese]
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We have developed a novel rotational vibrating disk gyroscope using a silicon bulk micromachining technique. The vibrating disk is driven in the rotational direction by electrostatic force using comb finger actuator and is supported by four notched springs. The chip has the size of 8mm×8mm square, which includes the disk shaped vibrating mass with a diameter of 2mm and a thickness of 55μm. Additionally, we adapted the ASIC by using Multi-Chip Service (MICS/MCS) for signal processing. We finally obtained the sensitivity of 28μV/(deg/sec).
- The Journal of the Institute of Electrical Engineers of Japan
The Journal of the Institute of Electrical Engineers of Japan 119(8), 411-416, 1999-08
The Institute of Electrical Engineers of Japan