超電導磁気浮上を用いたマイクロ搬送アクチュエータ A Micro Convayance Actuator based on Superconducting Magnetic Levitation
The design and the driving characteristics of a micro conveyance actuator based on superconducting magnetic levitation are reported. This actuator consists of three parts; a superconductor (<i>Y-Ba-Cu-O</i>), a stator layer made by patterned copper electrodes on the poly-imide film and a slider with four permanent magnets (the size of one magnet is 1<i>mm</i> cube). This conveyance actuator is free from particle generation, because there is no contact between moving and stationary parts by the magnetic levitation. The position of the slider is controlled by the current in patterned electrodes. In this paper, we discuss the driving characteristics of the linear and rotary motion by using the micro-step actuation. We have obtained the quick conveyance with the speed of 280μ<i>m</i>/<i>s</i> in the range of 2.8<i>mm</i> and the precise positioning with the accuracy of 40μ<i>m</i> by combining the step actuation in the entire area and the micro-step actuation in the local area near the target position.
- 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society
電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 119(8), 417-423, 1999-08
The Institute of Electrical Engineers of Japan