X線照射を用いたマイクロキャピラリ用傾斜側壁の加工技術 [in Japanese] Micro Capillary Array Chip For DNA Analysis Fabricated by Deep X-ray Lithography [in Japanese]
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A concept of new micro capillary array chip for DNA analysis was proposed and it was fabricated by deep X-ray lithography technology. The chip was made of PMMA and it contains 20 micro channels with width of 50μm, depth of 100μm and space between channels of 10 to 50μm. As an technique to control an inclination angle of a micro channel side wall, a newly developed moving mask LIGA (M<sup>2</sup>LIGA) technology was proposed. The side wall inclination angle was successfully controlled between 90 to 70 degree by varying a diameter of a mask movement.
- The Journal of the Institute of Electrical Engineers of Japan
The Journal of the Institute of Electrical Engineers of Japan 119(10), 482-488, 1999-10
The Institute of Electrical Engineers of Japan