Evaluation of the Electric Field above a Specimen Surface during SIMS Analysis.

• YAMAZAKI Hideyuki

  Toshiba Corporation, Research and Development Center

• ENDA Toshiyuki

  Toshiba Corporation, Semiconductor Company, ULSI Device Engineering Laboratory

Abstract

The electric field above specimen surfaces mounted in specimen holders was investigated. After confirming an agreement of the field distortion area obtained from SIMS experiments using a Cameca IMS-4f ion microscope and computer simulation, the field distortions above specimen surfaces of various types of holder were estimated. Two findings were obtained: (i) the field distortion area near to the window edge of the holder increases along with an increase in the faceplate thickness of the holder, and (ii) a holder with a tapered faceplate produces a more uniform electric field than does that with a right-angled window edge.

Journal

• Analytical Sciences

  Analytical Sciences 16 (5), 483-485, 2000

  The Japan Society for Analytical Chemistry

Keywords

• Analytical Chemistry

Details

• CRID: 1390001204258501632
• NII Article ID: 130004440264
• NII Article ID: 10004954564
• NII Book ID: AA10500785
• DOI: 10.2116/analsci.16.483
• COI: 1:CAS:528:DC%2BD3cXjslCns7Y%3D
• ISSN: 13482246
• ISSN: 09106340
• NDL BIB ID: 5383497
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I5383497
• Web Site: https://link.springer.com/content/pdf/10.2116/analsci.16.483.pdf
• Web Site: https://link.springer.com/article/10.2116/analsci.16.483/fulltext.html
• Web Site: http://www.jstage.jst.go.jp/article/analsci/16/5/16_5_483/_pdf
• Text Lang: en
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed