Computation Program System for Structural Analysis and Quantification of Organic Contaminants on Silicon Wafer Surfaces from Mass Spectra.

• SAITO Keiji

  UBE Scientific Analysis Laboratory, Inc.

• SIMIZU Hiroshi

  UBE Scientific Analysis Laboratory, Inc.

• OGAWA Toshio

  Kanazawa Institute of Technology, Laboratory for Ecological Polymer and Organic Materials

抄録

A computer program was developed for the identification and quantification of organic contaminants on silicon wafer surfaces and related materials based on GC/MS spectral data. Information, such as the retention time (RT), mass number and peak intensity, was stored on 359 chemical compounds in the database. Some empirical equations were presented for calculating the existence probabilities of certain organic compounds. This method was confirmed for the identification and quantification of ultratrace organic contaminants on silicon wafer surfaces and related materials.

収録刊行物

• Analytical Sciences

  Analytical Sciences 16 (6), 593-596, 2000

  社団法人 日本分析化学会

キーワード

• Analytical Chemistry

詳細情報

• CRID: 1390282679233660544
• NII論文ID: 10004955042
• NII書誌ID: AA10500785
• DOI: 10.2116/analsci.16.593
• COI: 1:CAS:528:DC%2BD3cXksVOitrY%3D
• ISSN: 13482246
• ISSN: 09106340
• NDL書誌ID: 5380255
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I5380255
• Web Site: https://link.springer.com/content/pdf/10.2116/analsci.16.593.pdf
• Web Site: https://link.springer.com/article/10.2116/analsci.16.593/fulltext.html
• Web Site: http://www.jstage.jst.go.jp/article/analsci/16/6/16_6_593/_pdf
• 本文言語コード: en
• データソース種別:
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  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可