ホロー陰極放電への電極形状効果

• 小野田 元

  金門電気(株)

• 菅原 實

  八戸工大•電気電子

書誌事項

タイトル別名

• Effect of the electrode shape on the hollow cathode discharge

抄録

The hollow cathode discharges are characterized by a low maintaining voltage and high current density. This unique feature of the hollow cathode discharge, however, is the effect of the cathode geometry, in that electrons are trapped between the two plates due to potential distribution of the cathode fall and then can undergo a limited number of collisions with plasma particles, reverse direction and repeatedly across the cathode fall region. This possibility of making multiple passage of electrons greatly increase the ion-and photon producing effectiveness. Aims of this research are to determine the optimal shape and geometry among three typical shapes of the hollow cathode, a pair of two parallel plates, a square shaped cylinder and a circular cylinder. It is concluded that the most suitable shape of the hollow cathode is the long circular cylinder because of the lowest maintaining voltage and high current density among these three.

収録刊行物

• 電気学会論文誌．　Ａ

  電気学会論文誌．　Ａ 120 (12), 1127-1128, 2000

  一般社団法人 電気学会

キーワード

• グロー放電
• ホロー陰極放電
• 低気圧放電
• 放電陰極
• プラズマソース

詳細情報

• CRID: 1390001204599987072
• NII論文ID: 10005321889
• NII書誌ID: AN10136312
• DOI: 10.1541/ieejfms1990.120.12_1127
• ISSN: 13475533
• ISSN: 03854205
• Web Site: https://www.jstage.jst.go.jp/article/ieejfms1990/120/12/120_12_1127/_pdf
• データソース種別:
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  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可