書誌事項
- タイトル別名
-
- A hysteresis movement analysis of micro-cantilever with constant bending moment driven by electro-static force
- イチヨウ マゲ モーメント オ モツ セイデンクドウ ビサイハリ ノ ヒステリシス トクセイ カイセキ
この論文をさがす
抄録
Bending processes of micro-cantilevers with constant bending moment driven by electro-static force are investigated and analyzed theoretically by using finite-difference method (FDM), Newton's method and bisection method. In this analysis, a mode boundary chart is introduced to illustrate boundaries of some deformation modes, which are categorized by the contact situation between the cantilever and an electrode substrate. From the mode boundary chart, existence of hysteresis movement of the cantilever is predicted and transition processes of deformation modes are analyzed. To confirm the usefulness of the theoretical analysis, micro-cantilevers are fabricated and cantilever's deformation curves are observed experimentally at various applied voltages. As a result, the deformation curves of cantilevers demonstrate the usefulness of the theoretical predictions.
収録刊行物
-
- 電気学会論文誌E(センサ・マイクロマシン部門誌)
-
電気学会論文誌E(センサ・マイクロマシン部門誌) 120 (11), 498-502, 2000
一般社団法人 電気学会
- Tweet
詳細情報 詳細情報について
-
- CRID
- 1390001204459979264
-
- NII論文ID
- 10005725730
-
- NII書誌ID
- AN1052634X
-
- ISSN
- 13475525
- 13418939
-
- NDL書誌ID
- 5537402
-
- データソース種別
-
- JaLC
- NDL
- Crossref
- CiNii Articles
-
- 抄録ライセンスフラグ
- 使用不可