非回転工具を用いた超精密マイクロ溝の創成

DOI Web Site 被引用文献8件 参考文献10件

書誌事項

タイトル別名
  • Creation of Ultraprecision Microgrooves Using Non-Rotational Cutting Tools.
  • ヒカイテン コウグ オ モチイタ チョウセイミツ マイクロ コウ ノ ソウセイ

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抄録

This study deals with the creation of ultraprecision microgrooves using non-rotational diamond tools mounted on an ultraprecision machining center. Two types of non-rotational V-shaped diamond tools with the same inclined angle of 90 degree were prepared, with rake angles of 0 and 10 degrees respectively. Microgroove machining experiments were conducted to find the value of the optimal cutting speed, changing the cutting speed from 5 mm/min to 100 mm/min. The optimal condition is judged by investigating the burr generation and shape of chips. Up to the total depth of cut of 10 pm, straight-shaped chips came out, and the surface roughness was good, although burrs were generated. On the other hand, with a total depth of cut up to 20μm, wave-like chips came out and a good surface roughness was obtained. In addition, no buns were found on the machined surface. However, the use of cutting fluid led to the generation of wave-like chips and no burrs up to the total depth of cut of 20μm. From the experimental results, it is found that the adequate cutting condition is that the rake angle is 0 degrees and cutting speed of 40 mm/min with the cutting fluid kerosene dripped. Using this cutting condition, cross, parallel and curved V-shaped microgrooves were machined. As a result, fine microgrooves were obtained, which are applicable to micro optical devices.

収録刊行物

  • 精密工学会誌

    精密工学会誌 66 (9), 1456-1460, 2000

    公益社団法人 精密工学会

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