磁性流体を用いた局所領域の微小研磨

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タイトル別名
  • Micro Surface Polishing Using Magnetic Fluid in Local Area.
  • ジセイ リュウタイ オ モチイタ キョクショ リョウイキ ノ ビショウ ケンマ

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抄録

Lenses, mirrors and mold dies of high accuracy require local uniform grinding in micron scale for their best quality. A new type of magnetic fluid grinding is introduced for this purpose. The grinding system consists of actuators, a magnetic ball as a tool, non-magnetic workpiece (borosilicate glass), non-magnetic abrasive grains, a segment of magnet and magnetic fluid. The effect of magnetic field on grinding properties is carefully observed. It is concluded that the local uniform grinding in micron scale is possible by this method, which means that the combination of magnetic fluid and magnetic field can provide unique micro grinding.

収録刊行物

  • 精密工学会誌

    精密工学会誌 60 (11), 1606-1610, 1994

    公益社団法人 精密工学会

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