超低露点清浄空気発生装置の開発

• 西村 浩一

  高砂熱学工業 (株) 総合研究所

• 岡村 典明

  高砂熱学工業 (株) 総合研究所

書誌事項

タイトル別名

• Development of Ultra Low Dew-point Clean Air Generator.
• チョウテイロテン セイジョウ クウキ ハッセイ ソウチ ノ カイハツ

抄録

To reduce the manufacturing cost of semiconductors, some systems have been proposed that use a cheap and high purity Clean Dry Air (CDA) CDA can reduce process step such as wafer cleaning, because CDA flow in stocker prevents the wafer surface from adsorbing of moisture and organic impurities. We have already optimized a two-stage rotary dehumidifier and have conducted a study of methods for cheaply manufacturing air that has a low dew-point of -70°C to -50°C. We have further developed the method in which a dry dehumidifier is used, and developed an ultra low dew-point air generator. The air generator is a three-stage rotary dehumidifier in which a further stage is added to the two-stage rotary dehumidifier. The main component of the rotors is metal silicate. The air generator can supply dry air with a dew point of -110°C. or less, in which the concentration in all gaseous contaminants is far below 1 ppb. We made a trial calculation of the manufacturing cost, and an average cost of 0.25 yen/m³ was obtained.

収録刊行物

• 化学工学論文集

  化学工学論文集 26 (3), 332-335, 2000

  公益社団法人 化学工学会

キーワード

• adsorption
• clean dry air
• dehumidifying rotors
• honeycomb rotor dehumidifier
• metal silicate rotors

詳細情報

• CRID: 1390001204510519424
• NII論文ID: 10006948562
• NII書誌ID: AN00037234
• DOI: 10.1252/kakoronbunshu.26.332
• ISSN: 13499203
• ISSN: 0386216X
• NDL書誌ID: 5452146
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I5452146
• Web Site: http://www.jstage.jst.go.jp/article/kakoronbunshu1975/26/3/26_3_332/_pdf
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可