Application of Atmospheric-Pressure Microplasma Jets to High-Speed Microfabrication

• ICHIKI Takanori

  Faculty of Engineering, Toyo University

• TAURA Ryo

  Faculty of Engineering, Toyo University

• HORIIKE Yasuhiro

  Graduate School of Engineering, The University of Tokyo

Bibliographic Information

Other Title

• ドライプロセスによる表面処理　　大気圧マイクロプラズマジェットの微細加工への応用

Journal

• Journal of The Surface Finishing Society of Japan

  Journal of The Surface Finishing Society of Japan 52 (12), 843-844, 2001

  The Surface Finishing Society of Japan

Keywords

• Microplasma Jet
• Atmospheric Pressure
• High-speed Etching

Details

• CRID: 1390001204117748224
• NII Article ID: 10007482403
• NII Book ID: AN1005202X
• DOI: 10.4139/sfj.52.843
• COI: 1:CAS:528:DC%2BD38Xhs1Wmtbo%3D
• ISSN: 18843409
• ISSN: 09151869
• ISSN: http://id.crossref.org/issn/09151869
• Text Lang: ja
• Data Source:
  • JaLC
  • Crossref
  • CiNii Articles