Ｘ線光電子分光法によるニオブ酸リチウム薄膜の表面分析

• 小野 さとみ

  名古屋市工業研究所

• 西 保夫

  名古屋市工業研究所

書誌事項

タイトル別名

• Surface Analysis of Lithium Niobate Films by XPS.
• Xセン コウデンシ ブンコウホウ ニ ヨル ニオブサン リチウム ハクマク ノ ヒョウメン ブンセキ

抄録

The hydrolysis and crystallization of the surfaces of sol-gel derived lithium niobate precursor films were analyzed by XPS and XRD. The Nb/Li ratio was 1.3 in the surface composition of amorphous films and 1.2 in that of partially crystallized films. These findings showed that the ratio finally approaches to 1 that is the stoichiometric composition ratio, depending on the progress of the crystallization in the films. The preheat-treatment of the precursor films in humidity was effective for decreasing the crystallization temperature. This was due to the releasing of the acetic acid chelating the precursor molecules. In the process of analyzing the composition of the lithium niobate film surface, Li was selectively etched.

収録刊行物

• 表面科学

  表面科学 22 (12), 818-821, 2001

  公益社団法人 日本表面科学会

キーワード

• General Computer Science

詳細情報

• CRID: 1390001206455043584
• NII論文ID: 10007485993
• NII書誌ID: AN00334149
• DOI: 10.1380/jsssj.22.818
• COI: 1:CAS:528:DC%2BD38XhsF2rsLw%3D
• ISSN: 18814743
• ISSN: 03885321
• NDL書誌ID: 6006912
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I6006912
• Web Site: http://www.jstage.jst.go.jp/article/jsssj/22/12/22_12_818/_pdf
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可