混合ガス中容量結合型RF放電の絶縁破壊特性

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  • Breakdown Characteristics of Capacitively Coupled RF Discharges in Gas Mixtures
  • コンゴウ ガス チュウ ヨウリョウ ケツゴウガタ RF ホウデン ノ ゼツエン ハカイ トクセイ

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RF (13.56MHz) breakdown conditions of Ne-N2 and Ar-N2 mixtures are investigated in a parallel plate capacitively coupled device with varying the total pressure p, N2 mix ratio and the electrode spacing L. In both mixtures, the dependence of the breakdown voltage VB on p exhibits typical V-shaped curve in most mix ratios. As the mix ratio is increased, VB in the right branch of V-shaped curve increases at a fixed p, strongly depending on p. Present numerical results show that the pressure dependence of the rate of increase of VB may be attributed to the difference in the dominant inelastic process, which has a great influence on the electron energy distribution related to the electron production. The similarity law and Penning effect are also studied in these mixtures. Experimental results show that the similarity law is virtually valid in the right branch where the amplitude of the periodic motion of electrons is small, and the decrease of VB (Penning effect) is observed in a certain range of pL, which becomes narrow with the increase of the mix ratio.

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