MnZn フェライト薄膜の微細構造に及ぼす熱処理雰囲気および添加物の効果 Effects of Additives and Annealing Atmospheres on the Microstructure of MnZn Ferrite Thin Films

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Manganese zinc ferrite thin films were prepared on quartz substrates buffered by a (00l) oriented ZnO underlayer by conventional rf magnetron sputtering method Mn-Zn-Fe oxide layers deposited on the ZnO underlayers were annealed in various atmospheres at 800°C for 5hours. When the films were annealed either at reduced pressure in air or in N<SUB>2</SUB> gas flow, single phase spinel-type ferrite was formed. Manganese zinc ferrite films annealed in N<SUB>2</SUB> gas flow had excellent soft magnetic characteristics compared with the films annealed at reduced pressure in air because of their remarkable grain growth. Furthermore, Bi<SUB>2</SUB>O<SUB>3</SUB> and V<SUB>2</SUB>O<SUB>5</SUB> were added for the purpose of inducing crystal grain growth. Manganese zinc ferrite films with Bi<SUB>2</SUB>O<SUB>3</SUB> were improved in their saturation magnetization because of their grain growth and good crystallinity. On the other hand, manganese zinc ferrite films with V<SUB>2</SUB>O<SUB>5</SUB> showed excellent soft magnetic characteristics, when vanadium of 0.51 at.% was added.

収録刊行物

  • 粉体および粉末冶金

    粉体および粉末冶金 49(2), 108-113, 2002-02-15

    Japan Society of Powder and Powder Metallurgy

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各種コード

  • NII論文ID(NAID)
    10008007339
  • NII書誌ID(NCID)
    AN00222724
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    05328799
  • NDL 記事登録ID
    6059925
  • NDL 雑誌分類
    ZP41(科学技術--金属工学・鉱山工学)
  • NDL 請求記号
    Z17-274
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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