Development of Ultra-miniaturized Multilayer Ceramic Chip Components and Multilayer Module.

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  • 電子部品・材料  超小型積層セラミックチップ部品と積層モジュールの開発
  • ジュショウ キネン コウエン ヘイセイ 12ネンド ギジュツ コウセキショウ チョウコガタ セキソウ セラミックチップ ブヒン ト セキソウ モジュール ノ カイハツ

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Abstract

High-speed laser drilling using low laser power and flexible circuit layout were applied to the fabrication of 3-dimensional circuits in multilayer ceramics of miniaturized chip inductors and high-frequency power amplifier modules. The optimized combination of pulse YAG laser energy and the laser absorption coefficient of machined materials realized ultra-fine through-holes formed in thin ceramic green sheets without damaging plastic film where ceramic slurry was cast. Laser drilling based on thermal ablation.

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