Dissociation of large screw dislocation via SiC epitaxial growth by CVD
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- KAMATA Isaho
- Central Research Institute of Electric Power Industry
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- TSUCHIDA Hidekazu
- Central Research Institute of Electric Power Industry
Bibliographic Information
- Other Title
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- 新しい結晶成長技術化学気相たい積法によるSiCエピタキシャル成長における大型らせん転位の分解
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Journal
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- 應用物理
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應用物理 71 (5), 576-577, 2002-05-10
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Details 詳細情報について
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- CRID
- 1572261549576619776
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- NII Article ID
- 10008201098
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- NII Book ID
- AN00026679
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- ISSN
- 03698009
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- Text Lang
- ja
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- Data Source
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- CiNii Articles