隔膜真空計における熱遷移現象の数値解析 Numerical Simulation of Thermal Transpiration of Capacitance Diaphragm Gauge

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The Capacitance diaphragm gauge (CDG) is one of the most important vacuum gauges in low and middle vacuum ranges. The difference of temperature between the sensor head and the vacuum chamber gives a non-linear sensitivity of the gauge depending on the pressure due to thermal transpiration effect. Change in the sensitivity of about 4% between molecular flow regime and viscous flow regime is significant for metrological use of the gauge. In this study, by using a DSMC method, pressure distribution in the connecting tube of the gauge was obtained under the pressure range from molecular flow regime to viscous flow regime with taking account of temperature distribution along the connecting tube. It was in good agreement with the pressure dependence of sensitivity obtained by static expansion system experimentally. Furthermore, influence of gas-surface interaction on the thermal transpiration was also discussed.

収録刊行物

  • 真空

    真空 45(3), 119-122, 2002-03-20

    The Vacuum Society of Japan

参考文献:  2件中 1-2件 を表示

  • <no title>

    BIRD G. A.

    Molecuar GasDunamics and the Direct Simulation of Gas Flows, 1994

    被引用文献1件

  • <no title>

    TAKAISHI T.

    Trans. Faraday Soc. 59, 2503, 1963

    DOI 被引用文献9件

各種コード

  • NII論文ID(NAID)
    10008202764
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    SHO
  • ISSN
    05598516
  • NDL 記事登録ID
    6144075
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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