Transparent Conducting Indium Tin Oxide Films Prepared by Pulsed Laser Deposition Using High Power ArF Excimer Laser.

• SUZUKI Akio

  Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University

• MORI Akihito

  Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University

• SAKAMOTO Jun

  Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University

• TANI Yoshiyuki

  Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University

• AOKI Takanori

  Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University

• MATSUSHITA Tatsuhiko

  Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University

• OKUDA Masahiro

  Department of Physics and Electronics, College of Engineering, Osaka Prefecture University

Bibliographic Information

Other Title

• 高出力エキシマレーザーを用いたパルスレーザー堆積法で作製した酸化インジウムスズ透明導電膜
• コウシュツリョク エキシマレーザー オ モチイタ パルスレーザー タイセキホウ デ サクセイ シタ サンカ インジウムスズ トウメイ ドウデン マク

Abstract

In₂O₃ doped with 5 wt% SnO₂ (indium-tin oxide (ITO) (5 wt%)) films were deposited on glass substrates by pulsed laser deposition using an ArF excimer laser (λ= 193 nm). In all experiments, repetition rates of 150 Hz, the energy density of 6 J/cm², and an ablation time of 30-900 sec were used. A lowest resistivity of 8.45 × 10^-5 Ω ·cm and an optical transmittance of more than 80% in the visible range of the spectrum were obtained for ITO (5 wt%) films of approximately 300-nm thickness fabricated at a substrate temperature of 400°C and oxygen pressure of 10 Pa. Smooth surfaces with an average surface roughness of 1.26 nm were observed by field-emission scanning electron microscopy (FESEM) and atomic force microscopy (AFM).

Journal

• Shinku

  Shinku 45 (3), 243-246, 2002

  The Vacuum Society of Japan

Keywords

• Electrical and Electronic Engineering
• Surfaces, Coatings and Films
• Condensed Matter Physics

Details

• CRID: 1390282679041500032
• NII Article ID: 10008203066
• NII Book ID: AN00119871
• DOI: 10.3131/jvsj.45.243
• ISSN: 18809413
• ISSN: 05598516
• ISSN: http://id.crossref.org/issn/05598516
• NDL BIB ID: 6144573
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I6144573
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed