偏光解析法による水分子吸着量変化の測定 Measurement of Variations in Water Adsorption by the Ellipsometry

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抄録

In order to improve the stability of mass standards, it is necessary to estimate the amount of the water adsorption on the surface of a weight. In this report the physical adsorption of water molecules on a stainless steel weight was measured using an ellipsometer. The variations in the physical adsorption was determined to be in the range from 0.022μg/cm<SUP>2</SUP> to 0.036μg/cm<SUP>2</SUP> for the change in the relative humidity from 0.8% to 45%. The sensitivity used for this calculation was estimated using a five-medium model consisting of air, water adsorption layer, oxide layer, surface roughness, and substrate.

収録刊行物

  • 真空

    真空 45(3), 289-292, 2002-03-20

    The Vacuum Society of Japan

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各種コード

  • NII論文ID(NAID)
    10008203155
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    SHO
  • ISSN
    05598516
  • NDL 記事登録ID
    6144709
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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