スパッタリング法による薄膜3層構造を有した固体酸化物燃料電池の作製条件の検討 Preparation of Solid Oxide Fuel Cell Having a Three-Layer Film Structure Grown by RF Magnetron Sputtering

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Solid oxide fuel cell (SOFC) having a three-layer film of Ni/YSZ/Ni structure with 20-40μm was prepared on the porous Al<SUB>2</SUB>O<SUB>3</SUB> substrate by RF magnetron sputtering. The structural and electrical properties of the YSZ electrolyte and Ni electrode films were investigated for various layer thicknesses. Ni electrode film grown at an RF power of 300 W indicated the columnar structure and resistivity of the film decreased with increasing layer thickness. Although conductivity of a SOFC having a three-layer film grown on the Al<SUB>2</SUB>O<SUB>3</SUB> substrate increased with increasing layer thickness, its value was reduced by two order compared with theoretical one, because YSZ electrolyte was deformed to structure with many pores by the thermal energy.

収録刊行物

  • 真空

    真空 45(3), 305-308, 2002-03-20

    The Vacuum Society of Japan

参考文献:  4件中 1-4件 を表示

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    田川博章

    固体酸化物燃料電池と地球環境, 1998

    被引用文献13件

  • <no title>

    長田

    真空 42(3), 151-154, 1999

    被引用文献1件

  • <no title>

    OKAYAMA H.

    Proceedings on The 6th International Symposium on Sputtering & Plasma Processes, ISSP 2001 Committee 1(1), 374-377, 2001

    被引用文献1件

  • <no title>

    日本化学会編

    電気 磁気, 丸善 170, 1991

    被引用文献1件

被引用文献:  1件中 1-1件 を表示

各種コード

  • NII論文ID(NAID)
    10008203188
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    SHO
  • ISSN
    05598516
  • NDL 記事登録ID
    6144756
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  CJP引用  NDL  J-STAGE 
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