Growth of Thick 4H-SiC Epilayers in a Vertical Radiant-Heating Reactor

• TSUCHIDA H.

収録刊行物

• Mater. Res. Soc. Symp. Proc.

  Mater. Res. Soc. Symp. Proc. 640 2001

詳細情報

• CRID: 1571980074596992256
• NII論文ID: 10008217084
• データソース種別:
  • CiNii Articles