Process-Induced Morphological Defects in Epitaxial CVD Silicon Carbide

• POWELL J. A.

収録刊行物

• Phys. stat. sol. (b)

  Phys. stat. sol. (b) 202 529-, 1997

詳細情報

• CRID: 1570854174690150016
• NII論文ID: 10008217087
• NII書誌ID: AA00773464
• データソース種別:
  • CiNii Articles