New micro stereo lithography for freely movable 3D structure-Super IH process with submicron resolution-

• IKUTA K.

収録刊行物

• Proc of the IEEE International Workshop on Micro Electro Mechanical Systems (MEMS 98)

  Proc of the IEEE International Workshop on Micro Electro Mechanical Systems (MEMS 98) 290 1998

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• NII論文ID: 10008375893
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