酸素を添加した超臨界流体二酸化炭素による超高真空装置用アルミニウム表面の汚染除去 Surface Cleaning on Aluminum for Ultrahigh Vacuum Using Supercritical Fluid CO_2 with O_2

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Supercritical fluid (SCF) CO<SUB>2</SUB> has been employed for cleaning of organic contamination on the surface. However, the cleaning rate was 2% at 25 MPa in SCFCO<SUB>2</SUB> alone. Oxygen (O<SUB>2</SUB>) was added to base SCFCO<SUB>2</SUB> to improve the rate by utilizing oxidizing effect. Aluminum sample is φ5 × t1. After a sample was cleaned in the fluid with 02, the surface was analyzed using x-ray photoelectron spectroscopy (XPS). Assuming that C1s peak in XPS spectra represents organic contamination, the contamination rate is defined as the ratio of area of C1s peak and summation of the area of C1s, O1s, and Al2p peaks. The cleaning rate at 55°C for 30 minute cleaning was 25% at 2030 MPa in SCFCO<SUB>2</SUB>with O<SUB>2</SUB> of 1.5 MPa. The cleaning at the constant ratio of O<SUB>2</SUB> pressure against SCFCO<SUB>2</SUB> pressure showed that cleaning rate is approximately proportional to the oxygen molecule number. The addition of oxygen is primarily effective on cleaning of the organic contamination, where base SCFCO<SUB>2</SUB> showed secondary effect on cleaning.

収録刊行物

  • 真空

    真空 45(4), 372-376, 2002-04-20

    The Vacuum Society of Japan

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各種コード

  • NII論文ID(NAID)
    10008421909
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    SHO
  • ISSN
    05598516
  • NDL 記事登録ID
    6169165
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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