レーザー解説 Precise Structuring Using Femtosecond Lasers (「フェムト秒レーザーによる無機材料の微細加工」解説小特集号) Precise Structuring Using Femtosecond Lasers

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Femtosecond (fs) lasers are perfect laser sources for material processing when highest accuracy and smallest structure sizes are required. Due to the ultrashort interaction time and the high peak power the process is generally characterized by the absence of heat diffusion and, consequently, molten layers. Moreover, the process is nearly independent of the material and recent results demonstrate the possibility to ablate material with sub-μm accuracy or even nm dimension while maintaining an outstanding reproducibility. Also, certain technically important materials like metals with high heat conductivity, semiconductors, and dielectrics with high transparency in the visible and uv can be processed by fs laser pulses which have been unable to machine so far with conventional laser radiation. In contrast to longer laser pulses, the absorption and ablation process can be described in a more simple way resulting in a higher reproducibility and controlability of the process.<br>Besides the microelectronics industry there are numerous potential applications in the field of automotive supplier industry, medicine technology and finally telecommunication.

収録刊行物

  • レーザー研究

    レーザー研究 30(5), 221-225, 2002-05-15

    The Laser Society of Japan

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各種コード

  • NII論文ID(NAID)
    10008508745
  • NII書誌ID(NCID)
    AN00255326
  • 本文言語コード
    ENG
  • 資料種別
    REV
  • ISSN
    03870200
  • NDL 記事登録ID
    6168092
  • NDL 雑誌分類
    ZN33(科学技術--電気工学・電気機械工業--電子工学・電気通信)
  • NDL 請求記号
    Z16-1040
  • データ提供元
    CJP書誌  CJP引用  NDL  J-STAGE 
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