Evaluation of an Open-air type Silicon Capacitive Micro Accelerometer

• ASO Hideaki

  Graduate School of Engineering, Tohoku University

• NISHIZAWA Mitsutomo

  Venture Business Laboratory, Tohoku University

• NIITSUMA Hiroaki

  Graduate School of Engineering, Tohoku University

Bibliographic Information

Other Title

• 大気開放静電容量型マイクロ加速度センサの製作とその特性評価

Journal

• 物理探査学会学術講演会講演論文集 = Proceeding of the SEGJ Conference

  物理探査学会学術講演会講演論文集 = Proceeding of the SEGJ Conference 106 101-104, 2002-05-22

Details

• CRID: 1570291224736052736
• NII Article ID: 10008594209
• NII Book ID: AN10532932
• Text Lang: ja
• Data Source:
  • CiNii Articles