Local heating method by a Nd:YAG laser beam for the measurements of the optical properties of Si wafers

この論文にアクセスする

この論文をさがす

著者

抄録

The local heating method by a Nd:YAG laser beam was applied to Si wafers to evaluate thermal variations of their optical properties.<BR>Firstly, the optical properties such as transmittance, reflectance and absorptance for the Nd:YAG laser beam (the wavelength, 1.06 μm), and their variations with temperature ranging from the room temperature to near the melting point (1685°K) were measured. From the results, the variations of the absorption coefficients were derived and correlated with the calculated thermal variation of the energy gap.<BR>Secondly, the numerical simulations for the temperature distribution, and the temperature gradient distribution on the locally heated specimen by Nd:YAG laser beam were carried out by using Bessel function. The locally generated thermal stress is also discussed.

収録刊行物

  • Mineralogical journal

    Mineralogical journal 17(5), 219-230, 1995-03-01

    Japan Association of Mineralogical Sciences

参考文献:  19件中 1-19件 を表示

各種コード

  • NII論文ID(NAID)
    10008771129
  • NII書誌ID(NCID)
    AA00739590
  • 本文言語コード
    ENG
  • 資料種別
    ART
  • ISSN
    05442540
  • データ提供元
    CJP書誌  J-STAGE 
ページトップへ