TEM and STEM study for a-Si/SiNx interface structure

• HOUJOU H.

収録刊行物

• Proceedings of 50th conference of Japanese Society of Electron Microscopy

  Proceedings of 50th conference of Japanese Society of Electron Microscopy 149 1994

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• CRID: 1570291224754029824
• NII論文ID: 10008809530
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  • CiNii Articles