A combined objective lens-energy analyser for electron beam testing of IC

• T.-T. Tang

• Y. Wang

• X.-D. Liu

Bibliographic Information

Other Title

• combined objective lens-energy analyser

Journal

• Journal of electron microscopy

  Journal of electron microscopy 47 (1), 1-7, 1998-01

  Oxford : Published for the Japanese Society of Electron Microscopy by Oxford University Press

Details

• CRID: 1523106605309281664
• NII Article ID: 10008812545
• NII Book ID: AA00697060
• ISSN: 00220744
• NDL BIB ID: 4462704
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4462704
• Text Lang: en
• NDL Source Classification:
  • ZN33(科学技術--電気工学・電気機械工業--電子工学・電気通信)
• Data Source:
  • NDL
  • CiNii Articles