Practical SEM system based on the montage technique applicable to ultralow-magnification observation, while maintaining original functions

• Eisaku Oho

• Kenichi Okugawa

• Shigeru Kawamata

Bibliographic Information

Other Title

• Practical SEM system based on the montage technique applicable to ultralow magnification observation while maintaining original functions

Journal

• Journal of electron microscopy

  Journal of electron microscopy 49 (1), 135-141, 2000

  Oxford : Published for the Japanese Society of Electron Microscopy by Oxford University Press

Keywords

• digital image processing
• scanning electron microscope
• PC-SEM
• active image processing

Details

• CRID: 1523951030288432000
• NII Article ID: 10008817232
• NII Book ID: AA00697060
• ISSN: 00220744
• NDL BIB ID: 5315897
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I5315897
• Text Lang: en
• NDL Source Classification:
  • ZN33(科学技術--電気工学・電気機械工業--電子工学・電気通信)
• Data Source:
  • NDL
  • CiNii Articles