Ti系薄膜の摩擦・磨耗特性における真空圧力及び雰囲気ガス種依存症 Dependence on Various Vacuum Pressures and Gas Atmospheres for Tribological Property of Ti-Based Thin Films
Tribological properties of Ti-based (Ti, TiO<SUB>2</SUB> and TiN) films on the stainless steel (304SS) substrate were investigated in the atmosphere of N<SUB>2</SUB>, O<SUB>2</SUB> and air at several pressures. Films 0.2 μm thick were prepared on the mirror-polished substrate with an ion beam assisted deposition method, an ion beam assisted reactive deposition method and the dynamic ion mixing method. Tribological tests were carried out with a friction tester of Pin-On-Disk type in a high vacuum equipment. The wear surface was observed with an optical microscope, a scanning laser microscope and a scanning electron microscope.<BR>The friction coefficients of stainless steel, Ti, TiO<SUB>2</SUB> and TiN film increased with decreasing a pressure and those except of stainless steel converged on 0.3 in a pressure of 1 × 10<SUP>-3</SUP> Pa. In an O<SUB>2</SUB> atmosphere, the behavior of the Ti film in a friction coefficient for a pressure was similar to that of the TiO<SUB>2</SUB> film, and in a N<SUB>2</SUB> atmosphere, the friction coefficients of Ti and TiN film showed the same value. These results suggested the relation between a kind of a gas atmosphere in the tribological test and the film element.
真空 45(5), 453-457, 2002-05-20
The Vacuum Society of Japan