プラズマコーティング初期段階の TiN, TiCN および TiC 薄膜の集合組織 Texture Formation of TiN, TiCN and TiC Films at Incipient Stage during Plasma Coating

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The texture formation of TiN, TiCN and TiC films at the incipient stage during plasma coating on (011) [100] single crystals of silicon steel was investigated using the electron back scattering diffraction (EBSD) method.<BR>The orientation of very thin TiN film parallel to the normal direction (ND) exhibited separate (111) and (100) colonies of about 20-30 μm areas with low angles, whereas that to the rolling direction (RD) also exhibited separate <111> and <110> colonies.<BR>In contrast, the orientation of very thin TiCN and TiC films parallel to the ND and the RD was random.<BR>It should be noted that the smaller misfits of ceramic films and single crystals of silicon steel makes colonies coherent to the ND or the RD orientation at the incipient stage during plasma coating.

収録刊行物

  • 真空

    真空 45(5), 468-472, 2002-05-20

    The Vacuum Society of Japan

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各種コード

  • NII論文ID(NAID)
    10008831135
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    SHO
  • ISSN
    05598516
  • NDL 記事登録ID
    6193482
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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