高親水表面を利用した改良インピンジャー捕集法とこれを用いたクリーンルーム空気中の酸性,塩基性汚染物質の自動モニタ Improved Impinger Air Sampling Method by Using Highly Hydrophilic Surface and its Application to Automatic Monitor for Acidic or Basic Contaminations in Cleanroom Air

この論文にアクセスする

この論文をさがす

著者

抄録

We have developed an automatic air monitoring apparatus for measuring trace amounts of acidic or basic contaminants in clean room air. The apparatus includes an ion chromatograph and uses a new air sampling method. Its absorbing vessel is a tube made of quartz glass whose inner surface is cleaned with ultraviolet light so as to be highly hydrophilic. When an air sample is bubbled into 6 ml of absorbing water, the bubbles rise stably to the upper part of the tube and the inner surface is coated with water film. Since the air sample has sufficient contact with the absorbing water, analytical components can be effectively absorbed into the water. It takes 27 min to analyze a sample consisting of organic and inorganic acid of more than 0.1 μg/m<SUP>3</SUP> in air.

収録刊行物

  • エアロゾル研究 = Journal of aerosol research

    エアロゾル研究 = Journal of aerosol research 17(2), 83-88, 2002-06-20

    日本エアロゾル学会

参考文献:  5件中 1-5件 を表示

  • <no title>

    FUJIMOTO T.

    Earozoru Kenkyu 14, 19-26, 1999

    被引用文献1件

  • <no title>

    SUZUKI Y.

    18th Annual Technical Meeting on Air Cleaning and Contamination Control, A-22, 2000

    被引用文献1件

  • <no title>

    HASE U.

    Kukiseijyo 35, 291-297, 1998

    被引用文献1件

  • <no title>

    DIONEX Corporation

    Installation Instructions and Troubleshooting Guide Column and IONPAC AS12A Analytical Column, 24-45, 1998

    被引用文献1件

  • <no title>

    DIONEX Corporation

    Application note, Application update 138, 1-3, 1998

    被引用文献1件

各種コード

  • NII論文ID(NAID)
    10008837078
  • NII書誌ID(NCID)
    AN10041511
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    09122834
  • NDL 記事登録ID
    6193513
  • NDL 雑誌分類
    ZP5(科学技術--化学・化学工業--化学工学)
  • NDL 請求記号
    Z17-1062
  • データ提供元
    CJP書誌  NDL  J-STAGE 
ページトップへ