静電気を除去する低ノイズクリーンイオナイザの開発 Development of Anti-electrostatic Air Ionizer with a Low Level of Electromagnetic Noise and Particle Generation

この論文にアクセスする

この論文をさがす

著者

抄録

In the manufacturing processes of electric devices and systems, anti-electrostatic technology is applied to prevent production yield reduction due to electrostatic charge. Ionizers with corona discharge electrodes which emit air ions neutralize electrostatic charge. High voltage sources and cables of ionizers generate noises due to ESD (Electro-static Discharge), which cause deterioration and malfunctions of electric devices and systems. We have developed a low noise air ionizer with single crystal silicon emitters which generate corona-discharge at 6 kV AC voltage of 50/60 Hz. The count of particles with diameter larger than 0.05 μm measured at 22 cm away from the emitter was less than 70 count/m<SUP>3</SUP> (2 count/ft<SUP>3</SUP>) during continuous 6-month operation. The deterioration rate of the Si emitters was about 0.8 μm /month.

収録刊行物

  • エアロゾル研究 = Journal of aerosol research

    エアロゾル研究 = Journal of aerosol research 17(2), 105-114, 2002-06-20

    日本エアロゾル学会

参考文献:  4件中 1-4件 を表示

各種コード

  • NII論文ID(NAID)
    10008837134
  • NII書誌ID(NCID)
    AN10041511
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    09122834
  • NDL 記事登録ID
    6193544
  • NDL 雑誌分類
    ZP5(科学技術--化学・化学工業--化学工学)
  • NDL 請求記号
    Z17-1062
  • データ提供元
    CJP書誌  NDL  J-STAGE 
ページトップへ