静電気を除去する低ノイズクリーンイオナイザの開発 Development of Anti-electrostatic Air Ionizer with a Low Level of Electromagnetic Noise and Particle Generation
In the manufacturing processes of electric devices and systems, anti-electrostatic technology is applied to prevent production yield reduction due to electrostatic charge. Ionizers with corona discharge electrodes which emit air ions neutralize electrostatic charge. High voltage sources and cables of ionizers generate noises due to ESD (Electro-static Discharge), which cause deterioration and malfunctions of electric devices and systems. We have developed a low noise air ionizer with single crystal silicon emitters which generate corona-discharge at 6 kV AC voltage of 50/60 Hz. The count of particles with diameter larger than 0.05 μm measured at 22 cm away from the emitter was less than 70 count/m<SUP>3</SUP> (2 count/ft<SUP>3</SUP>) during continuous 6-month operation. The deterioration rate of the Si emitters was about 0.8 μm /month.
- エアロゾル研究 = Journal of aerosol research
エアロゾル研究 = Journal of aerosol research 17(2), 105-114, 2002-06-20