粒子ビーム技術の広がり : 粒子ビーム技術の材料産業への応用 Evolution of Particle Beam Technique : Applications of Beam Technology to Material Industry

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The beam technology developed for neutral beam injection in thermonuclear fusion research has been applied to industry. Currently, positive ion beams are widely applied to processing of semiconductors. For example, intense argon ion beams are used for milling substrates of silicon wafers, and large-area liquid crystal displays are also manufactured by implanting P<SUP>+</SUP> or B<SUP>+</SUP> ions on glass plates. Recently, intense negative ion beams have also been developed and are being applied to new fields in the semiconductor industry. Japan Atomic Energy Research Institute (JAERI) is developing a new technology to slice thin single-crystal semiconductor films of several tens of micrometers in thickness from the ingot without waste by implanting the MeV-class H<SUP>-</SUP> ion beam developed for ITER. This process is realized only by utilizing the high-energy negative ion beam since positive ion implantation requires mass separation that practically limits the ion beam energy, namely, the penetration depth of the ions. By implanting 725 keV H<SUP>-</SUP> ions directly onto the Si ingot, single-crystal Si plates of 10 µm in thickness have been successfully sliced. It is expected that this technology will allow the mass productions of high efficiency solar cells and micro-machines.

収録刊行物

  • プラズマ・核融合学会誌 = Journal of plasma and fusion research

    プラズマ・核融合学会誌 = Journal of plasma and fusion research 78(6), 541-547, 2002-06-25

    The Japan Society of Plasma Science and Nuclear Fusion Research

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各種コード

  • NII論文ID(NAID)
    10008840907
  • NII書誌ID(NCID)
    AN10401672
  • 本文言語コード
    JPN
  • 資料種別
    REV
  • ISSN
    09187928
  • NDL 記事登録ID
    6193366
  • NDL 雑誌分類
    ZM35(科学技術--物理学)
  • NDL 請求記号
    Z15-8
  • データ提供元
    CJP書誌  CJP引用  NDL  J-STAGE 
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