Strategy for Silicon Wafers

• Murakami Masanori

  Department of Materials Science and Engineering, Kyoto University

Bibliographic Information

Other Title

• ２１世紀の材料戦略と日本金属学会の果たす役割　　シリコンウェーハ戦略について

Journal

• Materia Japan

  Materia Japan 40 (5), 481-482, 2001

  The Japan Institute of Metals and Materials

Keywords

• silicon wafer
• strategy

Details

• CRID: 1390001204053929728
• NII Article ID: 10008846015
• NII Book ID: AN10433227
• DOI: 10.2320/materia.40.481
• ISSN: 18845843
• ISSN: 13402625
• Web Site: https://www.jstage.jst.go.jp/article/materia1994/40/5/40_5_481/_pdf
• Text Lang: ja
• Data Source:
  • JaLC
  • Crossref
  • CiNii Articles