Production of a Large-Area Microwave Plasma by a Ring Slot Antenna

• SHIMATANI Kouhei

収録刊行物

• Plasma Science Symposium 2001/The 18^<th> Symposium on Plasma Proccssing

  Plasma Science Symposium 2001/The 18^<th> Symposium on Plasma Proccssing 539 2001

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• CRID: 1573105974472513408
• NII論文ID: 10008847612
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