A Few Nanometers'Polishing of Nip Plated Magnetic Disk Substrate with AL_2O_3 Abrasives

• YASUI H

Journal

• Proc.3rd Int. Ultraprecision Manufacturing Eng., Aachen, Germany,

  Proc.3rd Int. Ultraprecision Manufacturing Eng., Aachen, Germany, 438 1994

Details

• CRID: 1572824499676164992
• NII Article ID: 10010080032
• Data Source:
  • CiNii Articles