Molecular Dynamics Analysis on Microstructure of Silicon Surface Finished by Mechanical Processes

• TANAKA H.

収録刊行物

• Proc. ICPE 9th Conference, Osaka

  Proc. ICPE 9th Conference, Osaka 1 1019-, 1999

詳細情報

• CRID: 1572824499675883520
• NII論文ID: 10010081009
• データソース種別:
  • CiNii Articles