Nanoscale Engineering of Nanotube Tip in Nanofactory.

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  • AKITA Seiji
    Department of Physics and Electronics, Graduate School of Engineering, Osaka Prefecture University
  • NEGISHI Hideki
    Department of Physics and Electronics, Graduate School of Engineering, Osaka Prefecture University
  • NAKAYAMA Yoshikazu
    Department of Physics and Electronics, Graduate School of Engineering, Osaka Prefecture University

Bibliographic Information

Other Title
  • 走査型電子顕微鏡内に設置したナノスケール加工装置（ナノファクトリー）を用いたカーボンナノチューブの切断と先端先鋭化
  • ソウサガタ デンシ ケンビキョウ ナイ ニ セッチ シタ ナノスケール カコウ ソウチ ナノファクトリー オ モチイタ カーボンナノチューブ ノ セツダン ト センタン センエイカ

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Abstract

We have developed a nanofactory which is a field emission type scanning electron microscope with build-in three independent stages. The nanofactory enables us in situ manipulation of nanoscale materials such as an individual carbon nanotube. Using the nanofactory, the fabrication of an artificial nanotube-nanocoil has been demonstrated. We have also demonstrated the nanoscale engineering of the nanotube tip in the nanofactory using an electrical breakdown of the nanotube which is caused by the excess current passing through the nanotube. The shape of the nanotube tip depends on the initial contact resistance between the nanotube and the electrode.

Journal

  • Shinku

    Shinku 45 (12), 854-857, 2002

    The Vacuum Society of Japan

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